XY Piezo Nanopositioning Stages

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The QNP2 series XY, parallel-kinematic, piezo positioning stages from Aerotech (Pittsburgh, PA) combine sub-nanometer resolution, high dynamics and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50 mm x 50 mm clear aperture with closed-loop and travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). Features include:

  • A design ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy and other applications where two-sided part access is required.
  • A parallel-kinematic flexure and metrology design that ensures the highest level of multi-axis accuracy. FEA-optimized precision flexures ensure high-stiffness and long device life.
  • Availability with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage enabling 0.15 nm resolution, 0.01% linearity, and 1 nm bidirectional repeatability.

www.aerotech.com; 412-963-7470

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