The A-361 XY-rotation stage combines a low profile of just 39.5 mm with a spacious 200 mm diameter motion platform. It provides precise translational motion of 5 mm in both X and Y directions and rotational motion around the Z axis of ±2°. This compact yet powerful design delivers high stability, precision, and flexibility for advanced motion control tasks.
The A-361 PIglide XY-theta stage is ideal for high-precision applications such as:
- Wafer inspection and semiconductor testing
- Flat-panel display metrology
- Fiber and optics alignment
- Maskless lithography
- Micro-LED (µLED) and advanced LED manufacturing
- Photonics and material research
Key Features & Benefits:
- Low-Profile Design: Only 39.5 mm in height, maximizing workspace efficiency.
- Frictionless Bearing System: Air bearings ensure smooth, wear-free motion and maintenance-free operation.
- Integrated Lock-Down Mechanism: Provides ultra-high stability by eliminating servo jitter in critical alignment tasks.
- Built-In Vacuum Chuck: Securely holds wafers or delicate substrates for semiconductor and optics use.
- Direct Drive Motors: Voice-coil drives deliver frictionless, dynamic response with up to 6 N continuous and 19.2 N peak force.
- Payload Capacity: Supports up to 3 kg while maintaining high precision.
- Cleanroom Compatibility: Designed for ISO 8573-1 oil-free air operation; consumes only 28 L/min.
- Durable Construction: Lightweight, hard-anodized aluminum ensures longevity and rigidity.
The A-361 can be combined with the A-523 Z Tip/Tilt Stage to form a six-degree-of-freedom nanopositioning stack, providing complete spatial control for complex photonics, optics, and micro-assembly tasks. PI also offers integrated accessories, including air-preparation kits, multi-axis controllers, and custom cabling for seamless integration.
