XYZ Piezo Stages for 3D Positioning Accuracy

Aerotech 590b8031b4c8c

The QNP3 series XYZ piezo positioning stages from Aerotech (Pittsburgh, PA) combine sub-nanometer resolution, high dynamics and excellent geometric performance in a compact three-degree-of-freedom (DoF) package. They come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm). The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation. Other benefits include:

  • Precision Parallel-Kinematic Design. QNP3 piezo stages use an FEA-optimized precision parallel-kinematic flexure and metrology design to ensure superior multi-axis accuracy, high stiffness and long device life.
  • Sub-Nanometer Performance. QNP3 stages are available with closed or open-loop feedback. The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01% and single-digit nanometer repeatability.
  • Ultra-Precision Control. When coupled with Aerotech’s Q-series controllers and drives, QNP3 stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high positioning bandwidth.
  • Design Options. An optional mounting plate provides direct mounting to English or metric breadboard optical tables. A solid tabletop is also offered. QNP3 piezo stages are available in custom materials, and in vacuum-prepared versions, upon request.; 412-963-7470

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