Siemens today announced the acquisition of Canopus AI, a provider of computational and AI-driven metrology solutions, enabling semiconductor manufacturers to achieve improved levels of precision and efficiency in wafer and mask inspection processes.
The semiconductor industry faces increasingly complex manufacturing challenges as device geometries continue to shrink and production volumes scale. Massive metrology has become critical to ensuring quality and yield in advanced semiconductor fabrication. Canopus AI's AI-powered solutions complement Siemens' existing portfolio, providing semiconductor manufacturers with intelligent inspection and measurement capabilities that drive operational excellence.
Founded in 2021 and based in Grenoble, France, Canopus AI is a software and AI company dedicated to revolutionizing wafer and mask metrology and inspection. Canopus AI is pioneering 'Metrospection,' an approach that enhances metrology and inspection workflows with AI. By bridging the gap between conventional wafer metrology and inspection, this software framework uses AI to help chip designers and manufacturers meet the extreme precision requirements of advanced technology nodes.
"We are delighted to join Siemens and bring the power of AI-enabled metrology in the semiconductor industry to a broader audience as part of Siemens' EDA community of users," said Joël Alanis, chief executive officer, Canopus AI. "Together, we'll empower innovators pushing the boundaries of semiconductor design and manufacturing with robust wafer and mask metrology and inspection and help them to meet the challenges of the rapidly changing semiconductor industry."
The transaction closed on January 12, 2026.
