Telecentric UV scanning lenses accommodate large input beam dia of up to 17 mm and wavelengths of 266 or 355 nm. They include 4 units with focal lengths of 34, 50, and two at 100 mm with scan fields of 9, 20, 45, and 55 mm, respectively. Diffraction limited units have deviation from telecentricity of less than 0.9 deg for single axis scanning and less than 3 deg for dual axis. F-Theta scan lenses are capable of achieving spot sizes of 1.4, 3.5, and 7.1 microns, respectively.