Large thick film flat panel heaters can be produced in single sheets or array of small heaters to achieve dimensions of larger than 47.24 x 55.11 in. with process heater temperatures up to 1,022°F. They are suited for both atmospheric and vacuum environments, and with single-piece construction, they can be manufactured with 0.13 in. profile. Heaters were developed to address photovoltaic industry’s transition to processing PV cells on large glass, stainless steel, and polymer substrates.