Based around Coherence Correlation Interferometry technique, Talysurf CCI Lite provides noncontact 3D surface texture, step height, and micro dimensional measurement. All types of rough, smooth, or highly reflective materials, including glass, metal, photo resist, polymer, liquid inks, and pastes, can be measured. System also provides automatic pattern measurement as well as X, Y, and Z stitching. Z stage is closed loop over full 100 mm range for high accuracy.