Able to measure roughness and contour of any shape in one pass, Hommel nanoscan can measure surfaces with stroke of 24 mm with resolution of 0.68 nm. Laser interferometer has resolution of 0.6 nm, allowing surface structures from submicrometer range to 24 or 48 mm to be recorded. CNC-controlled horizontal and vertical axes include digital scales providing resolution of 10 nm and probe arms are magnetically coupled on traverse unit to simplify handling, operation, and safety.