Low-bias, low-noise Model 1030 detects slow vibrations with 6,000 mV/G sensitivity. Integral 1/4-28 mounting stud and coaxial cable connector simplify installation. Sensor measures 2.5 in. high x 2 in. dia and weighs 430 g. It outputs data needed to assess and improve performance of precision equipment, including semiconductor process tools, electron microscopes, and micromachining instruments. Three sensors can be combined to form tri-axial accelerometer to monitor motion in three planes.