As the newest product in the Dektak line of surface profilers, the Dektak® 6M benchtop stylus profiler incorporates reliability with a low inertia sensor head to provide step height, surface roughness, and waviness measurements for samples up to 150 millimeters for a wide range of semiconductor, data storage, and industrial applications.

"The key component to the new Dektak is the Low-Inertia Sensor 3 head," explains Rick Olds, product line manager. "This sensor incorporates technological innovations that allow a reduction in noise and inertia as well as improved isolation and easier stylus replacement. These advances are due to the use of lighter composite materials, such as carbon and titanium, which reduce the scanning inertia. Electronic noise is also reduced through the use of ultra-high permeability material and the sensor design features increased magnetic shielding to isolate the electromagnetic field. Perhaps the most exciting aspect is that the improvements do not significantly increase the base price of the system. In addition to its unique combination of accuracy, ease of use, and simplicity of design, the Dektak 6M is surprisingly economical."

The Dektak 6M provides the versatility and performance required for a wide range of semiconductor, data storage, and industrial applications. It can accurately measure step heights on any surface, with a programmable stylus force down to 1 milligram and a Z-height capability up to 1 millimeter. In addition, it delivers high horizontal resolution, with up to 30,000 data points per scan. The easy-to-use Windows®-based software interface allows automatic comparisons of analytical results from multiple scans, and calculations of the mean, standard deviation, and maximum/minimum.