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Filter Elements attach to vacuum inlet or exhaust trap


Custom filter elements trap gases such as arsine, boron trifluoride, boron trichloride, and hydrochloric acid, and particulates as small as 0.1 µm. Media choices include SS gauze; copper gauze; molecular sieve; activated charcoal; activated alumina; 2, 5, or 20 µm pleated polypropylene; acetic acid sorbent; and polyester good to 165°C. Filter shells measure 2 3/4 in. dia x 4 1/2 in. or 9 1/2 in. high.

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