Noncontact Miniconoscan Model 3000 measures metal and plastic molds, as well as machined parts and tools at 500 points/sec while stages are in motion. Lens adjustment allows measurement from submicron to 200 mm. X and Y stages provide 3D precision and repeatability greater than 1/8,000 of working range. Collinear system also measures steep angles, blind slots, and small holes.